Product Model:
miniPSQ-BJEF Vibration Damping
miniPSQ-BOFH Vibration Damping
miniPSQ-BHDD Vibration Damping
Introduction:
The miniPAD series active vibration isolation platform integrates three or four vibration isolation modules into one unit. Each isolator uses coil springs/pneumatic air springs/magnetic levitation springs as the main support to achieve tri-directional vibration isolation. Combined with active vibration control in both vertical and horizontal directions, the system realizes high-performance active vibration isolation and stabilization across six degrees of freedom. The system can also be optionally equipped with precision positioning control functions. It meets the high-performance vibration isolation requirements for various types of electron microscopes.
Features:
● 3 or 4 isolator modules are integrated into an all-in-one platform
● Active vibration control
● Precision positioning control (optional)
● Take metal spring/air spring/magnetic suspension spring as the main support
to achieve three-way vibration isolation
● High-performance active vibration in 6 degrees of freedom
● Aplication:SEM, TEM, FESEM and other electron microscopy, precision laser,
micro and nano processing platform,precision optical equipment and other
precision instruments.
Specifications:
|
Model |
miniPSQ-BJEF |
miniPSQ-BOFH |
miniPSQ-BHDD |
|
Load Capacity |
60~180 kg |
100~120 kg |
60~120 kg |
|
Dimensions |
500*600*80（L*W*Hmm） |
600*800*80（L*W*Hmm） |
450*400*80（L*W*Hmm） |
|
Weight |
25kg |
30kg |
17kg |
|
Passive Element |
Coil Sping |
||
|
Degrees of Freedom |
6 |
||
|
Active Isolation Bandwidth |
0.7 ~ 150Hz |
||
|
Transmissibility |
≤-10dB@2Hz，≤-20dB@5Hz，≤-30dB@10Hz |
||
|
Horizontal Actuator Force per |
20N |
||
|
Vertical Actuator Force |
40N |
||
|
Max System Power |
100W |
||
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